<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0306</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2017-05-16</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000726514</issuerCik>
        <issuerName>ELECTRO SCIENTIFIC INDUSTRIES INC</issuerName>
        <issuerTradingSymbol>ESIO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001421764</rptOwnerCik>
            <rptOwnerName>Oldham Paul R</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>13900 NW SCIENCE PARK DR.</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>PORTLAND</rptOwnerCity>
            <rptOwnerState>OR</rptOwnerState>
            <rptOwnerZipCode>97229</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>CFO, Sr. VP of Finance</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2017-05-16</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>4235</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>227665.22</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">Represents the first year attainment of the three-year performance-based restricted stock unit award granted on May 17, 2016.  Earned shares are determined based on the relative performance of ESIO compared to the Russell 2000 Index. Although earned, vesting of any earned shares does not occur until three years after grant date, upon completion of the service period.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>By: Aric McKinnis, Attorney-in-Fact For: Paul R. Oldham</signatureName>
        <signatureDate>2017-05-18</signatureDate>
    </ownerSignature>
</ownershipDocument>
[{"type": "4", "sequence": "1", "filename": "edgardoc.xml", "description": "PRIMARY DOCUMENT", "secsgml_size_bytes": 3431}]
X0306
4
2017-05-16
0
0000726514
ELECTRO SCIENTIFIC INDUSTRIES INC
ESIO
0001421764
Oldham Paul R
13900 NW SCIENCE PARK DR.
PORTLAND
OR
97229
0
1
0
0
CFO, Sr. VP of Finance
Common Stock
2017-05-16
4
A
0
4235
0.0
A
227665.22
D
Represents the first year attainment of the three-year performance-based restricted stock unit award granted on May 17, 2016.  Earned shares are determined based on the relative performance of ESIO compared to the Russell 2000 Index. Although earned, vesting of any earned shares does not occur until three years after grant date, upon completion of the service period.
By: Aric McKinnis, Attorney-in-Fact For: Paul R. Oldham
2017-05-18