<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0202</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2005-04-01</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000726514</issuerCik>
        <issuerName>ELECTRO SCIENTIFIC INDUSTRIES INC</issuerName>
        <issuerTradingSymbol>ESIO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001229494</rptOwnerCik>
            <rptOwnerName>KONIDARIS NICHOLAS</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>13900 NW SCIENCE PARK DR.</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>PORTLAND</rptOwnerCity>
            <rptOwnerState>OR</rptOwnerState>
            <rptOwnerZipCode>97229</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>1</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>President and CEO</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2005-04-01</value>
            </transactionDate>
            <deemedExecutionDate>
                <value>2005-04-01</value>
            </deemedExecutionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>F</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>3504</value>
                    <footnoteId id="F1"/>
                </transactionShares>
                <transactionPricePerShare>
                    <value>19.39</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>D</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>17918</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <derivativeTable>
        <derivativeHolding>
            <securityTitle>
                <value>Incentive Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>25.5</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2014-07-12</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>15684</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>15684</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>25.5</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <footnoteId id="F2"/>
            </exerciseDate>
            <expirationDate>
                <value>2014-07-12</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>24316</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>24316</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Non-Qualified Stock Option (right to buy)</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>25.71</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <footnoteId id="F3"/>
            </exerciseDate>
            <expirationDate>
                <value>2014-01-06</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>420000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>420000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Performance Restricted Stock Units Grant</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>0</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2007-07-12</value>
                <footnoteId id="F4"/>
            </exerciseDate>
            <expirationDate>
                <value>2007-07-12</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>20000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>20000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
        <derivativeHolding>
            <securityTitle>
                <value>Time-Based Restricted Stock Units Grant</value>
            </securityTitle>
            <conversionOrExercisePrice>
                <value>0</value>
            </conversionOrExercisePrice>
            <exerciseDate>
                <value>2009-07-22</value>
                <footnoteId id="F5"/>
            </exerciseDate>
            <expirationDate>
                <value>2009-07-22</value>
            </expirationDate>
            <underlyingSecurity>
                <underlyingSecurityTitle>
                    <value>Common Stock</value>
                </underlyingSecurityTitle>
                <underlyingSecurityShares>
                    <value>20000</value>
                </underlyingSecurityShares>
            </underlyingSecurity>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>20000</value>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </derivativeHolding>
    </derivativeTable>

    <footnotes>
        <footnote id="F1">Payment of tax liability by delivering 3504 shares incident to the vesting of restricted stock in accordance with Rule 16b-3.</footnote>
        <footnote id="F2">The ISO and NQ granted on this date vest together for 25% of the total shares on the first four anniversaries of the grant date.  Effective January 25, 2005 the vesting of the option was accelerated to be 100% vested on January 25, 2005, however exercisability is restricted to the original vesting schedule.</footnote>
        <footnote id="F3">Options become exercisable for 25% of the shares on the first four anniversaries of the grant date.  Effective January 25, 2005 the vesting of the option was accelerated to be 100% vested on August 26, 2005, however exercisability is restricted to the original vesting schedule.</footnote>
        <footnote id="F4">Performance-Based Restricted Stock Units cliff vest after three years following grant date if certain levels of performance are achieved vs. a peer group of companies.</footnote>
        <footnote id="F5">Time-Based Restricted Stock Units cliff vest on July 22, 2009.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>Nicholas Konidaris</signatureName>
        <signatureDate>2005-04-04</signatureDate>
    </ownerSignature>
</ownershipDocument>
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X0202
4
2005-04-01
0
0000726514
ELECTRO SCIENTIFIC INDUSTRIES INC
ESIO
0001229494
KONIDARIS NICHOLAS
13900 NW SCIENCE PARK DR.
PORTLAND
OR
97229
1
1
0
0
President and CEO
Common Stock
2005-04-01
2005-04-01
4
F
0
3504
19.39
D
17918
D
Incentive Stock Option (right to buy)
25.5
2014-07-12
Common Stock
15684
15684
D
Non-Qualified Stock Option (right to buy)
25.5
2014-07-12
Common Stock
24316
24316
D
Non-Qualified Stock Option (right to buy)
25.71
2014-01-06
Common Stock
420000
420000
D
Performance Restricted Stock Units Grant
0
2007-07-12
2007-07-12
Common Stock
20000
20000
D
Time-Based Restricted Stock Units Grant
0
2009-07-22
2009-07-22
Common Stock
20000
20000
D
Payment of tax liability by delivering 3504 shares incident to the vesting of restricted stock in accordance with Rule 16b-3.
The ISO and NQ granted on this date vest together for 25% of the total shares on the first four anniversaries of the grant date.  Effective January 25, 2005 the vesting of the option was accelerated to be 100% vested on January 25, 2005, however exercisability is restricted to the original vesting schedule.
Options become exercisable for 25% of the shares on the first four anniversaries of the grant date.  Effective January 25, 2005 the vesting of the option was accelerated to be 100% vested on August 26, 2005, however exercisability is restricted to the original vesting schedule.
Performance-Based Restricted Stock Units cliff vest after three years following grant date if certain levels of performance are achieved vs. a peer group of companies.
Time-Based Restricted Stock Units cliff vest on July 22, 2009.
Nicholas Konidaris
2005-04-04