<?xml version="1.0"?>
<ownershipDocument>

    <schemaVersion>X0306</schemaVersion>

    <documentType>4</documentType>

    <periodOfReport>2016-02-17</periodOfReport>

    <notSubjectToSection16>0</notSubjectToSection16>

    <issuer>
        <issuerCik>0000726514</issuerCik>
        <issuerName>ELECTRO SCIENTIFIC INDUSTRIES INC</issuerName>
        <issuerTradingSymbol>ESIO</issuerTradingSymbol>
    </issuer>

    <reportingOwner>
        <reportingOwnerId>
            <rptOwnerCik>0001435872</rptOwnerCik>
            <rptOwnerName>Wong Bing-Fai</rptOwnerName>
        </reportingOwnerId>
        <reportingOwnerAddress>
            <rptOwnerStreet1>13900 NW SCIENCE PARK DR.</rptOwnerStreet1>
            <rptOwnerStreet2></rptOwnerStreet2>
            <rptOwnerCity>PORTLAND</rptOwnerCity>
            <rptOwnerState>OR</rptOwnerState>
            <rptOwnerZipCode>97229</rptOwnerZipCode>
            <rptOwnerStateDescription></rptOwnerStateDescription>
        </reportingOwnerAddress>
        <reportingOwnerRelationship>
            <isDirector>0</isDirector>
            <isOfficer>1</isOfficer>
            <isTenPercentOwner>0</isTenPercentOwner>
            <isOther>0</isOther>
            <officerTitle>VP, Customer Operations</officerTitle>
        </reportingOwnerRelationship>
    </reportingOwner>

    <nonDerivativeTable>
        <nonDerivativeTransaction>
            <securityTitle>
                <value>Common Stock</value>
            </securityTitle>
            <transactionDate>
                <value>2016-02-17</value>
            </transactionDate>
            <transactionCoding>
                <transactionFormType>4</transactionFormType>
                <transactionCode>A</transactionCode>
                <equitySwapInvolved>0</equitySwapInvolved>
            </transactionCoding>
            <transactionAmounts>
                <transactionShares>
                    <value>4000.0</value>
                </transactionShares>
                <transactionPricePerShare>
                    <value>0.0</value>
                </transactionPricePerShare>
                <transactionAcquiredDisposedCode>
                    <value>A</value>
                </transactionAcquiredDisposedCode>
            </transactionAmounts>
            <postTransactionAmounts>
                <sharesOwnedFollowingTransaction>
                    <value>112990.4803</value>
                    <footnoteId id="F1"/>
                </sharesOwnedFollowingTransaction>
            </postTransactionAmounts>
            <ownershipNature>
                <directOrIndirectOwnership>
                    <value>D</value>
                </directOrIndirectOwnership>
            </ownershipNature>
        </nonDerivativeTransaction>
    </nonDerivativeTable>

    <footnotes>
        <footnote id="F1">The directly owned Common Stock holdings reflected in Table I of this form include 482 shares acquired on August 14, 2015, 500 shares acquired on November 14, 2015 and 471 shares acquired on February 14, 2016 under the ESI employee stock purchase plan.</footnote>
    </footnotes>

    <ownerSignature>
        <signatureName>By: Paul R. Oldham, Attorney-in-Fact For: Bing-Fai Wong</signatureName>
        <signatureDate>2016-02-18</signatureDate>
    </ownerSignature>
</ownershipDocument>
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X0306
4
2016-02-17
0
0000726514
ELECTRO SCIENTIFIC INDUSTRIES INC
ESIO
0001435872
Wong Bing-Fai
13900 NW SCIENCE PARK DR.
PORTLAND
OR
97229
0
1
0
0
VP, Customer Operations
Common Stock
2016-02-17
4
A
0
4000.0
0.0
A
112990.4803
D
The directly owned Common Stock holdings reflected in Table I of this form include 482 shares acquired on August 14, 2015, 500 shares acquired on November 14, 2015 and 471 shares acquired on February 14, 2016 under the ESI employee stock purchase plan.
By: Paul R. Oldham, Attorney-in-Fact For: Bing-Fai Wong
2016-02-18